Structural characterization of an (InAs) 8(AlAs) 2 superlattice on GaAs(001) with a four-circle X-ray diffractometer
An (InAs) 8(AlAs) 2 superlattice (SL) 0.3 μm thick grown on a GaAs(001) substrate by alternate layer molecular beam epitaxy, has been structurally characterized with a conventional four-circle X-ray diffractometer. Alternative structural models for any (InAl) n 1 (AlAs) n 2 SL are established. The S...
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Published in | Thin solid films Vol. 189; no. 2; pp. 329 - 338 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Lausanne
Elsevier B.V
15.08.1990
Elsevier Science |
Subjects | |
Online Access | Get full text |
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Summary: | An (InAs)
8(AlAs)
2 superlattice (SL) 0.3 μm thick grown on a GaAs(001) substrate by alternate layer molecular beam epitaxy, has been structurally characterized with a conventional four-circle X-ray diffractometer. Alternative structural models for any (InAl)
n
1
(AlAs)
n
2
SL are established. The SL Laue group
mmm was selected on the basis of the 2468 reflections measured in the half Ewald sphere of the sample. The structural model best matching the observed 200 SL independent reflections can be described by the space group
Pmm2, where a considerable improvement in the fit is reached by introducing some InAsAlAs diffusion through the interface, modulating the interplanar spacings, which is here indistinguishable from interface roughness. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(90)90462-M |