Special issue on Design, Test, Integration and Packaging of MEMS and MOEMS, 2016

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Bibliographic Details
Published inMicrosystem technologies : sensors, actuators, systems integration Vol. 24; no. 1; p. 361
Main Authors Nouet, Pascal, Michel, Bernd
Format Journal Article
LanguageEnglish
Published Berlin/Heidelberg Springer Berlin Heidelberg 2018
Subjects
Editorial
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
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ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-017-3677-1