Two-Stage-Driven Cantilever-Based RF Micro-Electro-Mechanical System Microswitch
Saved in:
Published in | Japanese Journal of Applied Physics Vol. 45; no. 6S; p. 5642 |
---|---|
Main Authors | , |
Format | Journal Article |
Language | English |
Published |
01.06.2006
|
Online Access | Get full text |
Cover
Loading…
ISSN: | 0021-4922 1347-4065 |
---|---|
DOI: | 10.1143/JJAP.45.5642 |