MICROFABRICATED TOOLS FOR PICK-AND-PLACE OF NANOSCALE COMPONENTS

We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in...

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Published inIFAC Proceedings Volumes Vol. 39; no. 16; pp. 120 - 126
Main Authors Bøggild, Peter, Petersen, Dirch Hjorth, Kjelstrup-Hansen, Jakob, Mølhave, Kristian, Andersen, Karin Nordstrøm, Sardan, Özlem
Format Journal Article
LanguageEnglish
Published 2006
Subjects
Electron microscopy
Nanomanipulation
Robotic manipulators
Nanomanipulation
Electron microscopy
Robotic manipulators
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Abstract We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.
AbstractList We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.
Author Sardan, Özlem
Petersen, Dirch Hjorth
Kjelstrup-Hansen, Jakob
Bøggild, Peter
Andersen, Karin Nordstrøm
Mølhave, Kristian
Author_xml – sequence: 1
  givenname: Peter
  surname: Bøggild
  fullname: Bøggild, Peter
– sequence: 2
  givenname: Dirch Hjorth
  surname: Petersen
  fullname: Petersen, Dirch Hjorth
– sequence: 3
  givenname: Jakob
  surname: Kjelstrup-Hansen
  fullname: Kjelstrup-Hansen, Jakob
– sequence: 4
  givenname: Kristian
  surname: Mølhave
  fullname: Mølhave, Kristian
– sequence: 5
  givenname: Karin Nordstrøm
  surname: Andersen
  fullname: Andersen, Karin Nordstrøm
– sequence: 6
  givenname: Özlem
  surname: Sardan
  fullname: Sardan, Özlem
BookMark eNqFkN9OwjAcRnuBiYi8Q1-g-Oufdd2do-uEOFYC87rZ2pIsUTCbMfHtBdFrr76rc_Ll3KHJ8XSMCGEKC04Ve2AAEjLKCCeFISyjdAEATEzQlIpUEClTuEXzcew7YGlCWZKkU_S4WeudLfPlbq3zxhS4sbba49Lu8Hatn0leF2Rb5dpgW-I6r-1e55XB2m62tjZ1s79HN4f2dYzz352hl9I0ekUq-3RWVsQzxQVpxUFJqqiXIfOgaOdD6IJIWYgdSJlBCzSJTHDgUolMUQ4iC1S0PLQSIuMzpK5eP5zGcYgH9z70b-3w5Si4SwD3F8BxVxh3CeB-ApzR5RWN53-ffRzc6Pt49DH0Q_QfLpz6_yXfk1tfbg
CitedBy_id crossref_primary_10_3390_act8040069
crossref_primary_10_1038_s41598_023_33654_6
Cites_doi 10.1109/JPROC.2003.818334
10.1109/84.128053
10.1166/jnn.2004.025
10.1021/nl034528o
10.1166/sl.2005.041
10.1088/0957-4484/12/3/322
10.1088/0957-4484/15/9/042
10.1126/science.286.5447.2148
10.1016/S0924-4247(01)00765-8
10.1038/16662
10.1016/S0167-7799(99)01304-9
10.1016/j.ultramic.2005.06.038
10.1088/0960-1317/15/6/018
ContentType Journal Article
Copyright 2006 IFAC
Copyright_xml – notice: 2006 IFAC
DBID AAYXX
CITATION
DOI 10.3182/20060912-3-DE-2911.00024
DatabaseName CrossRef
DatabaseTitle CrossRef
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
EndPage 126
ExternalDocumentID 10_3182_20060912_3_DE_2911_00024
S1474667015341525
GroupedDBID ALMA_UNASSIGNED_HOLDINGS
OK1
AAYXX
CITATION
ID FETCH-LOGICAL-c2834-a4f86181c6d9c081bcddbd472deb06690a015e243036849813049d14a3da60e23
ISSN 1474-6670
IngestDate Fri Aug 23 00:54:53 EDT 2024
Thu Jan 20 15:43:39 EST 2022
IsDoiOpenAccess false
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Issue 16
Keywords Nanomanipulation
Electron microscopy
Robotic manipulators
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c2834-a4f86181c6d9c081bcddbd472deb06690a015e243036849813049d14a3da60e23
OpenAccessLink https://doi.org/10.3182/20060912-3-de-2911.00024
PageCount 7
ParticipantIDs crossref_primary_10_3182_20060912_3_DE_2911_00024
elsevier_sciencedirect_doi_10_3182_20060912_3_DE_2911_00024
PublicationCentury 2000
PublicationDate 2006
2006-00-00
PublicationDateYYYYMMDD 2006-01-01
PublicationDate_xml – year: 2006
  text: 2006
PublicationDecade 2000
PublicationTitle IFAC Proceedings Volumes
PublicationYear 2006
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SSID ssib027512557
ssib036250806
ssib001723113
ssib001723112
ssib046627245
ssib028086724
Score 1.3939824
Snippet We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to...
SourceID crossref
elsevier
SourceType Aggregation Database
Publisher
StartPage 120
SubjectTerms Electron microscopy
Nanomanipulation
Robotic manipulators
Title MICROFABRICATED TOOLS FOR PICK-AND-PLACE OF NANOSCALE COMPONENTS
URI https://dx.doi.org/10.3182/20060912-3-DE-2911.00024
Volume 39
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1Lb9QwELaWcuGCQIAoL-XALTKsHcdJxIU0m9W23SYLu0W9Bb-2paBtBVsO_HrG8eaxVRGvS5REeXlm8vmzxzOD0EsluAyIkTgIwgjDn0ixlFJgopdxnZGcxDbe-ajgk2N2cBKeDAYfe6uWrtbylfpxY1zJv2gVzoFebZTsX2i2fSicgH3QL2xBw7D9Ix2DCN-X43TP1m0EBPIXZTmd-zCu82f72SFOixGeTdMst0t7irQo51k6zf2sPJqVRV4s5n1muj9OMxc2UHdn3_wPNW51s-jWpb4Xn55-clPJWwt764PNXA6AqDrzJ-fWIdTC-Tl0weuvV5d4Ilab6w7E5wvZ6ts9_cuZ-G762LM9KdFDUBYxzLmrBtJArMtX1JhSHzAJHfb6XuKi56_DOuCOTRNrXwT0huIAj3JME5t91XKMritrFxjO7WfYrwBAtxQlvIVu0ygJbXWFw3c9P2EE_LZH8Nxxi1g0Aj4Udn5hGsMIMOry20PvDwS381Mzm06f1pWxWzm45WO2Ca9_1YCbOVGP5yzuobubAYqXOmu7jwZm9QC9vWZpXm1pHliat21pXjn2WkvzOkt7iI7H-SKb4E3tDayAcDIs2DLmwP4U14kC2iiV1lKziGojgaUmQwGiNZRZBhSzJCbWXasJE4EWfGho8AjtrC5W5jHyYhiRE0GUXi410NUkHspAGB4abgLFI7WLSNP66tKlWKlgaGolVjUSq4JqlFdWYlUtsV30phFTtaGKjgJWYDK_vfvJf939FN3p5uGeoR34e8xzYKZr-aI2rp-bu24s
link.rule.ids 315,786,790,4043,27954,27955,27956
linkProvider Colorado Alliance of Research Libraries
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=MICROFABRICATED+TOOLS+FOR+PICK-AND-PLACE+OF+NANOSCALE+COMPONENTS&rft.jtitle=IFAC+Proceedings+Volumes&rft.au=B%C3%B8ggild%2C+Peter&rft.au=Petersen%2C+Dirch+Hjorth&rft.au=Kjelstrup-Hansen%2C+Jakob&rft.au=M%C3%B8lhave%2C+Kristian&rft.date=2006&rft.issn=1474-6670&rft.volume=39&rft.issue=16&rft.spage=120&rft.epage=126&rft_id=info:doi/10.3182%2F20060912-3-DE-2911.00024&rft.externalDocID=S1474667015341525
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1474-6670&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1474-6670&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1474-6670&client=summon