MICROFABRICATED TOOLS FOR PICK-AND-PLACE OF NANOSCALE COMPONENTS

We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in...

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Bibliographic Details
Published inIFAC Proceedings Volumes Vol. 39; no. 16; pp. 120 - 126
Main Authors Bøggild, Peter, Petersen, Dirch Hjorth, Kjelstrup-Hansen, Jakob, Mølhave, Kristian, Andersen, Karin Nordstrøm, Sardan, Özlem
Format Journal Article
LanguageEnglish
Published 2006
Subjects
Electron microscopy
Nanomanipulation
Robotic manipulators
Nanomanipulation
Electron microscopy
Robotic manipulators
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Summary:We present a high-aspect ratio three-beam electro-thermally actuated gripper made from single-crystalline, highly doped silicon, and compare the performance to a five-electrode electrostatic gripper in terms of actuation and manipulation capabilities. The electrothermal gripper can be configured in a number of different ways, which leads to a high degree of adaptability to various manipulation scenarios. Finally, we consider different options for customising the gripper microcantilevers by add-on nanotips.
ISSN:1474-6670
DOI:10.3182/20060912-3-DE-2911.00024