Range of Er ions in amorphous Si

We have measured the range and range straggling for energetic 100-900 keV Er ions in amorphous Si by means of Rutherford backscattering followed by spectrum analysis. The results are compared with other experimental data and Monte Carlo (SRIM-2003) calculations. Our experimental results show that, a...

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Published inApplied surface science Vol. 253; no. 2; pp. 937 - 943
Main Authors Liu, J., Lennard, W.N., Lee, J.-K.
Format Journal Article
LanguageEnglish
Published 15.11.2006
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Abstract We have measured the range and range straggling for energetic 100-900 keV Er ions in amorphous Si by means of Rutherford backscattering followed by spectrum analysis. The results are compared with other experimental data and Monte Carlo (SRIM-2003) calculations. Our experimental results show that, although the measured values for both range and range straggling exceed the SRIM predictions, they are nevertheless consistent with trends that have been previously observed. We see no anomalous trends in range and range straggling parameters for the rare earth ions for implant energies E > or = 100 keV. We present a detailed consideration of 4He stopping powers in Si due to its crucial impact on RBS range measurements.
AbstractList We have measured the range and range straggling for energetic 100-900 keV Er ions in amorphous Si by means of Rutherford backscattering followed by spectrum analysis. The results are compared with other experimental data and Monte Carlo (SRIM-2003) calculations. Our experimental results show that, although the measured values for both range and range straggling exceed the SRIM predictions, they are nevertheless consistent with trends that have been previously observed. We see no anomalous trends in range and range straggling parameters for the rare earth ions for implant energies E > or = 100 keV. We present a detailed consideration of 4He stopping powers in Si due to its crucial impact on RBS range measurements.
Author Lee, J.-K.
Lennard, W.N.
Liu, J.
Author_xml – sequence: 1
  givenname: J.
  surname: Liu
  fullname: Liu, J.
– sequence: 2
  givenname: W.N.
  surname: Lennard
  fullname: Lennard, W.N.
– sequence: 3
  givenname: J.-K.
  surname: Lee
  fullname: Lee, J.-K.
BookMark eNotkDtPwzAYRT0UibbwDxg8sSV8thPHHlFVHlIlJB6z5fgBiRI72M3AvydVO93hHl1dnQ1ahRgcQncESgKEP_SlnvKcTUkBeAmkBEZWaL1UsqgYo9dok3MPQKho2Brhdx2-HY4e7xPuYsi4C1iPMU0_cc74o7tBV14P2d1ecou-nvafu5fi8Pb8uns8FIYKeiykZxVppPDcyloSwS0XntVWOk5bsJ7ImksD3jrDeNtWsjFALOecWtqaSrAtuj_vTin-zi4f1dhl44ZBB7c8UVTWTEjgC1idQZNizsl5NaVu1OlPEVAnBapXZwXqpEABUYsC9g9_S1Ma
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Cites_doi 10.1016/0168-583X(95)01120-X
10.1016/0168-583X(91)95454-L
10.1016/S0921-5107(00)00742-X
10.1016/0375-9601(76)90376-5
10.1016/S0168-583X(98)80016-5
10.1016/0927-796X(94)00176-6
10.1016/j.apsusc.2005.02.019
10.1016/0168-9002(86)91033-8
10.1088/0022-3727/18/8/001
10.1016/S0168-583X(97)00833-1
10.1016/S0921-4526(01)00695-0
10.1016/0029-554X(80)90833-2
10.3320/1.2763863
10.1016/S1567-1739(02)00240-7
10.1016/0375-9601(77)90119-0
10.1016/S0168-583X(02)00494-9
10.1016/S0168-583X(03)01499-X
10.1016/0092-640X(74)90009-6
10.1016/0168-583X(87)90491-5
10.1016/0168-583X(96)00190-5
10.1016/0029-554X(80)91007-1
10.1016/S0168-583X(00)00089-6
10.1016/0168-583X(93)96071-J
10.1016/0168-583X(95)01338-5
10.1016/S0168-583X(99)00927-1
10.1063/1.1654511
10.1016/S0168-583X(99)00180-9
10.1063/1.111121
10.1016/0168-583X(92)95253-N
ContentType Journal Article
DBID AAYXX
CITATION
7SR
7U5
8BQ
8FD
JG9
L7M
DOI 10.1016/j.apsusc.2006.01.031
DatabaseName CrossRef
Engineered Materials Abstracts
Solid State and Superconductivity Abstracts
METADEX
Technology Research Database
Materials Research Database
Advanced Technologies Database with Aerospace
DatabaseTitle CrossRef
Materials Research Database
Engineered Materials Abstracts
Solid State and Superconductivity Abstracts
Technology Research Database
Advanced Technologies Database with Aerospace
METADEX
DatabaseTitleList Materials Research Database
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EndPage 943
ExternalDocumentID 10_1016_j_apsusc_2006_01_031
GroupedDBID --K
--M
-~X
.~1
0R~
1B1
1RT
1~.
1~5
23M
4.4
457
4G.
5GY
5VS
6J9
7-5
71M
8P~
9JN
AABNK
AABXZ
AACTN
AAEDT
AAEDW
AAEPC
AAIKJ
AAKOC
AALRI
AAOAW
AAQFI
AAQXK
AARLI
AAXKI
AAXUO
AAYXX
ABFNM
ABFRF
ABJNI
ABMAC
ABNEU
ABXDB
ABXRA
ACBEA
ACDAQ
ACFVG
ACGFO
ACGFS
ACNNM
ACRLP
ADBBV
ADECG
ADEZE
ADMUD
AEBSH
AEFWE
AEKER
AENEX
AEZYN
AFJKZ
AFKWA
AFRZQ
AFTJW
AFZHZ
AGHFR
AGUBO
AGYEJ
AHHHB
AIEXJ
AIKHN
AITUG
AIVDX
AJOXV
AJSZI
AKRWK
ALMA_UNASSIGNED_HOLDINGS
AMFUW
AMRAJ
ASPBG
AVWKF
AXJTR
AZFZN
BBWZM
BKOJK
BLXMC
CITATION
CS3
EBS
EFJIC
EJD
EO8
EO9
EP2
EP3
F5P
FDB
FEDTE
FGOYB
FIRID
FLBIZ
FNPLU
FYGXN
G-2
G-Q
GBLVA
HMV
HVGLF
HZ~
IHE
J1W
KOM
M24
M38
M41
MAGPM
MO0
N9A
NDZJH
O-L
O9-
OAUVE
OGIMB
OZT
P-8
P-9
P2P
PC.
Q38
R2-
RIG
RNS
ROL
RPZ
SCB
SDF
SDG
SDP
SES
SEW
SMS
SPC
SPCBC
SPD
SPG
SSK
SSM
SSQ
SSZ
T5K
TN5
WH7
WUQ
XPP
ZMT
~02
~G-
7SR
7U5
8BQ
8FD
JG9
L7M
ID FETCH-LOGICAL-c282t-9f341798f6d959186d68f35d9e62b0df19569c0fdec36bb497c01d6662d2bc483
ISSN 0169-4332
IngestDate Sat Oct 26 01:20:27 EDT 2024
Fri Sep 27 00:21:17 EDT 2024
IsPeerReviewed true
IsScholarly true
Issue 2
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c282t-9f341798f6d959186d68f35d9e62b0df19569c0fdec36bb497c01d6662d2bc483
Notes ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
PQID 29538906
PQPubID 23500
PageCount 7
ParticipantIDs proquest_miscellaneous_29538906
crossref_primary_10_1016_j_apsusc_2006_01_031
PublicationCentury 2000
PublicationDate 2006-11-15
PublicationDateYYYYMMDD 2006-11-15
PublicationDate_xml – month: 11
  year: 2006
  text: 2006-11-15
  day: 15
PublicationDecade 2000
PublicationTitle Applied surface science
PublicationYear 2006
References Lulli (10.1016/j.apsusc.2006.01.031_bib27) 2000; B170
Palmetshofer (10.1016/j.apsusc.2006.01.031_bib1) 2001; B81
Jeynes (10.1016/j.apsusc.2006.01.031_bib16) 1985; 18
10.1016/j.apsusc.2006.01.031_bib25
Mitchell (10.1016/j.apsusc.2006.01.031_bib35) 1977; 60A
Ziegler (10.1016/j.apsusc.2006.01.031_bib21) 1977
Custer (10.1016/j.apsusc.2006.01.031_bib18) 1994; 64
Yang (10.1016/j.apsusc.2006.01.031_bib15) 1991; B61
Mayerhofer (10.1016/j.apsusc.2006.01.031_bib4) 2005; 252
Chu (10.1016/j.apsusc.2006.01.031_bib10) 1978
Baragiola (10.1016/j.apsusc.2006.01.031_bib11) 1976; 56A
10.1016/j.apsusc.2006.01.031_bib7
Ziegler (10.1016/j.apsusc.2006.01.031_bib2) 1985
Friedland (10.1016/j.apsusc.2006.01.031_bib32) 1998; B136–138
Chini (10.1016/j.apsusc.2006.01.031_bib5) 2003; B212
10.1016/j.apsusc.2006.01.031_bib19
Bianconi (10.1016/j.apsusc.2006.01.031_bib26) 2000; B161-B163
Niemann (10.1016/j.apsusc.2006.01.031_bib24) 1996; B118
Behar (10.1016/j.apsusc.2006.01.031_bib8) 1995; R15
Lennard (10.1016/j.apsusc.2006.01.031_bib12) 1999; B152
Besenbacher (10.1016/j.apsusc.2006.01.031_bib9) 1980; 170
Kim (10.1016/j.apsusc.2006.01.031_bib29) 2003; 3
Grant (10.1016/j.apsusc.2006.01.031_bib30) 1975
Kuri (10.1016/j.apsusc.2006.01.031_bib34) 1996; B111
Konac (10.1016/j.apsusc.2006.01.031_bib14) 1998; B136–B138
Ziegler (10.1016/j.apsusc.2006.01.031_bib20) 1974; 13
Lennard (10.1016/j.apsusc.2006.01.031_bib13) 1986; A248
Schüle (10.1016/j.apsusc.2006.01.031_bib31) 1992; B62
Kuri (10.1016/j.apsusc.2006.01.031_bib33) 1996; B117
Fichtner (10.1016/j.apsusc.2006.01.031_bib6) 1987; B28
Barradas (10.1016/j.apsusc.2006.01.031_bib28) 2002; B194
Santry (10.1016/j.apsusc.2006.01.031_bib22) 1980; 178
Gibbons (10.1016/j.apsusc.2006.01.031_bib17) 1973; 22
Kocher (10.1016/j.apsusc.2006.01.031_bib3) 2001; B308
Niemann (10.1016/j.apsusc.2006.01.031_bib23) 1993; B80–81
References_xml – volume: B118
  start-page: 11
  year: 1996
  ident: 10.1016/j.apsusc.2006.01.031_bib24
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/0168-583X(95)01120-X
  contributor:
    fullname: Niemann
– volume: B61
  start-page: 149
  year: 1991
  ident: 10.1016/j.apsusc.2006.01.031_bib15
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/0168-583X(91)95454-L
  contributor:
    fullname: Yang
– volume: B81
  start-page: 83
  year: 2001
  ident: 10.1016/j.apsusc.2006.01.031_bib1
  publication-title: Mater. Sci. Eng.
  doi: 10.1016/S0921-5107(00)00742-X
  contributor:
    fullname: Palmetshofer
– volume: 56A
  start-page: 371
  year: 1976
  ident: 10.1016/j.apsusc.2006.01.031_bib11
  publication-title: Phys. Lett.
  doi: 10.1016/0375-9601(76)90376-5
  contributor:
    fullname: Baragiola
– volume: B136–B138
  start-page: 159
  year: 1998
  ident: 10.1016/j.apsusc.2006.01.031_bib14
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/S0168-583X(98)80016-5
  contributor:
    fullname: Konac
– volume: R15
  start-page: 1
  year: 1995
  ident: 10.1016/j.apsusc.2006.01.031_bib8
  publication-title: Mater. Eng. Sci.
  doi: 10.1016/0927-796X(94)00176-6
  contributor:
    fullname: Behar
– year: 1985
  ident: 10.1016/j.apsusc.2006.01.031_bib2
  contributor:
    fullname: Ziegler
– volume: 252
  start-page: 271
  year: 2005
  ident: 10.1016/j.apsusc.2006.01.031_bib4
  publication-title: Appl. Surf. Sci.
  doi: 10.1016/j.apsusc.2005.02.019
  contributor:
    fullname: Mayerhofer
– volume: A248
  start-page: 454
  year: 1986
  ident: 10.1016/j.apsusc.2006.01.031_bib13
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/0168-9002(86)91033-8
  contributor:
    fullname: Lennard
– ident: 10.1016/j.apsusc.2006.01.031_bib25
– year: 1975
  ident: 10.1016/j.apsusc.2006.01.031_bib30
  contributor:
    fullname: Grant
– volume: 18
  start-page: L93
  year: 1985
  ident: 10.1016/j.apsusc.2006.01.031_bib16
  publication-title: J. Phys. D Appl. Phys.
  doi: 10.1088/0022-3727/18/8/001
  contributor:
    fullname: Jeynes
– volume: B136–138
  start-page: 147
  year: 1998
  ident: 10.1016/j.apsusc.2006.01.031_bib32
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/S0168-583X(97)00833-1
  contributor:
    fullname: Friedland
– volume: B308
  start-page: 344
  year: 2001
  ident: 10.1016/j.apsusc.2006.01.031_bib3
  publication-title: Physica
  doi: 10.1016/S0921-4526(01)00695-0
  contributor:
    fullname: Kocher
– year: 1978
  ident: 10.1016/j.apsusc.2006.01.031_bib10
  contributor:
    fullname: Chu
– ident: 10.1016/j.apsusc.2006.01.031_bib19
– volume: 178
  start-page: 523
  year: 1980
  ident: 10.1016/j.apsusc.2006.01.031_bib22
  publication-title: Nucl. Instrum. Methods
  doi: 10.1016/0029-554X(80)90833-2
  contributor:
    fullname: Santry
– ident: 10.1016/j.apsusc.2006.01.031_bib7
  doi: 10.3320/1.2763863
– volume: 3
  start-page: 75
  year: 2003
  ident: 10.1016/j.apsusc.2006.01.031_bib29
  publication-title: Curr. Appl. Phys.
  doi: 10.1016/S1567-1739(02)00240-7
  contributor:
    fullname: Kim
– volume: 60A
  start-page: 337
  year: 1977
  ident: 10.1016/j.apsusc.2006.01.031_bib35
  publication-title: Phys. Lett.
  doi: 10.1016/0375-9601(77)90119-0
  contributor:
    fullname: Mitchell
– volume: B194
  start-page: 15
  year: 2002
  ident: 10.1016/j.apsusc.2006.01.031_bib28
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/S0168-583X(02)00494-9
  contributor:
    fullname: Barradas
– volume: B212
  start-page: 477
  year: 2003
  ident: 10.1016/j.apsusc.2006.01.031_bib5
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/S0168-583X(03)01499-X
  contributor:
    fullname: Chini
– volume: 13
  start-page: 463
  year: 1974
  ident: 10.1016/j.apsusc.2006.01.031_bib20
  publication-title: Atom. Data Nucl. Data Tables
  doi: 10.1016/0092-640X(74)90009-6
  contributor:
    fullname: Ziegler
– volume: B28
  start-page: 481
  year: 1987
  ident: 10.1016/j.apsusc.2006.01.031_bib6
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/0168-583X(87)90491-5
  contributor:
    fullname: Fichtner
– volume: B117
  start-page: 213
  year: 1996
  ident: 10.1016/j.apsusc.2006.01.031_bib33
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/0168-583X(96)00190-5
  contributor:
    fullname: Kuri
– volume: 170
  start-page: 183
  year: 1980
  ident: 10.1016/j.apsusc.2006.01.031_bib9
  publication-title: Nucl. Instrum. Methods
  doi: 10.1016/0029-554X(80)91007-1
  contributor:
    fullname: Besenbacher
– volume: B170
  start-page: 1
  year: 2000
  ident: 10.1016/j.apsusc.2006.01.031_bib27
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/S0168-583X(00)00089-6
  contributor:
    fullname: Lulli
– volume: B80–81
  start-page: 37
  year: 1993
  ident: 10.1016/j.apsusc.2006.01.031_bib23
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/0168-583X(93)96071-J
  contributor:
    fullname: Niemann
– volume: B111
  start-page: 234
  year: 1996
  ident: 10.1016/j.apsusc.2006.01.031_bib34
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/0168-583X(95)01338-5
  contributor:
    fullname: Kuri
– volume: B161-B163
  start-page: 293
  year: 2000
  ident: 10.1016/j.apsusc.2006.01.031_bib26
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/S0168-583X(99)00927-1
  contributor:
    fullname: Bianconi
– year: 1977
  ident: 10.1016/j.apsusc.2006.01.031_bib21
  contributor:
    fullname: Ziegler
– volume: 22
  start-page: 568
  year: 1973
  ident: 10.1016/j.apsusc.2006.01.031_bib17
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.1654511
  contributor:
    fullname: Gibbons
– volume: B152
  start-page: 370
  year: 1999
  ident: 10.1016/j.apsusc.2006.01.031_bib12
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/S0168-583X(99)00180-9
  contributor:
    fullname: Lennard
– volume: 64
  start-page: 437
  year: 1994
  ident: 10.1016/j.apsusc.2006.01.031_bib18
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.111121
  contributor:
    fullname: Custer
– volume: B62
  start-page: 338
  year: 1992
  ident: 10.1016/j.apsusc.2006.01.031_bib31
  publication-title: Nucl. Instrum. Methods Phys. Res.
  doi: 10.1016/0168-583X(92)95253-N
  contributor:
    fullname: Schüle
SSID ssj0012873
Score 1.9115746
Snippet We have measured the range and range straggling for energetic 100-900 keV Er ions in amorphous Si by means of Rutherford backscattering followed by spectrum...
SourceID proquest
crossref
SourceType Aggregation Database
StartPage 937
Title Range of Er ions in amorphous Si
URI https://search.proquest.com/docview/29538906
Volume 253
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1JS8QwFA6iFz2IK-7m4E1a0rTNJEcRRRQ9uKC30iQNjGBHZrl48Lf7XtN2OiqiXkrJITT52rek3_seIUd5iposWgXKSUhQImzkrrgOpHQK_L_qMYOJ4vWNuHhILp_Sp2l_wqq6ZKxD8_ZtXcl_UIUxwBWrZP-AbDspDMA94AtXQBiuv8L4FisDKm7g8LihhOcvA9g6JLbe9buRZxNujiZDl6OurP-oW0JOf1IBGk4ZOmWZe977Y3jTGfaH7mFwFX46MUDWWto9RBQKK6VmrCD3mr013Lxj05RXZando_KqSl8srz8EeA5zSO5Hpv7LE4WstvEzQtefHFBLC2wYZ8-ZnwV7ZIqMRRnDSvkFDrYEjVj43rJ4wLt6EkGzpKY6sqLwfX2W2ehj1vlWEcX9ClmuUwF64nFdJXNFuUaWOgKR64RWCNOBo2dDigjTfklbhOldf4M8nJ_dn14EdU-LwEByO4ZPIsaeb9IJq1IVSWGFdHFqVSG4ZtZh-aYyzNnCxELrRPUMiyzkmNxybRIZb5L5clAWW4RGTlqDCro955IcAm1uUmaNZklSRLGU2yRo1pq9eumS7Kcd3iaHzYZkYGPwx1FeFrCajCtwi4qJnT_OuEsWp-_fHpkfDyfFPsRwY31QofgB3Gk_ww
link.rule.ids 315,783,787,27936,27937
linkProvider Elsevier
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Range+of+Er+ions+in+amorphous+Si&rft.jtitle=Applied+surface+science&rft.au=Liu%2C+J.&rft.au=Lennard%2C+W.N.&rft.au=Lee%2C+J.-K.&rft.date=2006-11-15&rft.issn=0169-4332&rft.volume=253&rft.issue=2&rft.spage=937&rft.epage=943&rft_id=info:doi/10.1016%2Fj.apsusc.2006.01.031&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_apsusc_2006_01_031
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0169-4332&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0169-4332&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0169-4332&client=summon