One-dimensional hybrid simulation of the electrical asymmetry effect caused by the fourth-order harmonic in dual-frequency capacitively coupled plasma
A one-dimensional hybrid model was developed to study the electrical asymmetry effect（EAE） caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fourth-order frequency changes periodically with the phase angle,and the cycle of self-...
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| Published in | Chinese physics B Vol. 25; no. 11; pp. 387 - 392 |
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| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
01.11.2016
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| Online Access | Get full text |
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| Summary: | A one-dimensional hybrid model was developed to study the electrical asymmetry effect（EAE） caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fourth-order frequency changes periodically with the phase angle,and the cycle of self-bias with the phase angle is π/2,which is half of that in the second-order case.The influence of the phase angle between the fundamental and its fourth-order frequency on the ion density profiles and the ion energy distributions（IEDs） were studied.Both the ion density profile and the IEDs can be controlled by the phase angle,which provides a convenient way to adjust the sheath characters without changing the main discharge parameters. |
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| Bibliography: | harmonic asymmetry periodically sheath fourth adjust separate convenient cycle linearly 11-5639/O4 A one-dimensional hybrid model was developed to study the electrical asymmetry effect（EAE） caused by the fourthorder harmonic in a dual-frequency capacitively coupled Ar plasma.The self-bias voltage caused by the fourth-order frequency changes periodically with the phase angle,and the cycle of self-bias with the phase angle is π/2,which is half of that in the second-order case.The influence of the phase angle between the fundamental and its fourth-order frequency on the ion density profiles and the ion energy distributions（IEDs） were studied.Both the ion density profile and the IEDs can be controlled by the phase angle,which provides a convenient way to adjust the sheath characters without changing the main discharge parameters. |
| ISSN: | 1674-1056 2058-3834 |
| DOI: | 10.1088/1674-1056/25/11/115202 |