Fabrication of hollow nanoclusters by ion implantation

Ag ions with four kinds of energies were implanted into silica to doses of 5×1016 and 1×1017ions/cm2, respectively. Hollow Ag nanoclusters were observed in the 1×1017Ag+ions/cm2 implanted samples with energies of 150 and 200keV. The evolution of hollow nanoclusters during annealing was carried out b...

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Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 262; no. 2; pp. 201 - 204
Main Authors Ren, F., Jiang, C.Z., Cai, G.X., Fu, Q., Shi, Y.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.09.2007
Subjects
Ion implantation
Nanoclusters
Nanovoids
Ion implantation
Nanovoids
61.72.Ww
61.72.Qq
61.46.−W
Nanoclusters
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Summary:Ag ions with four kinds of energies were implanted into silica to doses of 5×1016 and 1×1017ions/cm2, respectively. Hollow Ag nanoclusters were observed in the 1×1017Ag+ions/cm2 implanted samples with energies of 150 and 200keV. The evolution of hollow nanoclusters during annealing was carried out by in situ transmission electron microscopy observation. The energy dependence for the formation of hollow nanoclusters is studied. A potential mechanism for the formation of irradiation-induced nanovoids in nanoclusters is discussed.
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ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2007.05.024