Fabrication and experimentation of vertical spring-type micromirror using shielding screen structure

A vertical spring-type micromirror was fabricated using a shielding screen structure. Unlike the micromirror that was fabricated using only shadow evaporation, the fabricated vertical springs in this case are well defined, using both shadow evaporation and a shielding screen structure. The static an...

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Bibliographic Details
Published inIEEE journal of selected topics in quantum electronics Vol. 5; no. 1; pp. 102 - 105
Main Authors Lim, Tae-Sun, Kim, Yong-Kweon
Format Journal Article
LanguageEnglish
Published IEEE 01.01.1999
Subjects
Etching
Fabrication
Fasteners
Large screen displays
Micromirrors
Mirrors
Plasma displays
Resists
Shape
Springs
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Summary:A vertical spring-type micromirror was fabricated using a shielding screen structure. Unlike the micromirror that was fabricated using only shadow evaporation, the fabricated vertical springs in this case are well defined, using both shadow evaporation and a shielding screen structure. The static and dynamic characteristics of micromirror are measured by means of contact-free optical measurement system. The downward threshold voltage is 16 V and the step response time is 16.8 /spl mu/s. Images are projected onto a screen using a simple projection system with the fabricated micromirror array.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1077-260X
1558-4542
DOI:10.1109/2944.748111