Plasma stratification in radio-frequency discharges in argon gas

We conducted experimental studies and computer simulations of standing striations in capacitive coupled plasma in agas. Standing striations were observed at frequencies 3.6, 8.4 and 19.0 MHz, in a pressure range 0.05-10 Torr, tube radius R = 1.1 cm, for a certain range of discharge currents (plasma...

Full description

Saved in:
Bibliographic Details
Published inJournal of physics. D, Applied physics Vol. 53; no. 25; pp. 25 - 29
Main Authors Kolobov, Vladimir I, Arslanbekov, Robert R, Levko, Dmitry, Godyak, Valery A
Format Journal Article
LanguageEnglish
Published IOP Publishing 17.06.2020
Subjects
high-frequency discharges
ionization waves
noble gases
plasma
stratification
Online AccessGet full text

Cover

More Information
Summary:We conducted experimental studies and computer simulations of standing striations in capacitive coupled plasma in agas. Standing striations were observed at frequencies 3.6, 8.4 and 19.0 MHz, in a pressure range 0.05-10 Torr, tube radius R = 1.1 cm, for a certain range of discharge currents (plasma densities). Numerical simulations revealed similar nature of standing striations in CCP and moving striations in DC discharges under similar discharge conditions. Comparisons to computer simulations with experimental observations helped clarify the nature of these striations. The non-linear dependence of the ionization rate on electron density is shown to be the main underlying mechanism of the stratification phenomena.
Bibliography:JPhysD-123530.R1
ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/ab7ca0