Emission and re-absorption of diffusion pump fluid breakdown products

Experiments are presented on the build-up of gaseous products in the forevacuum of a diffusion pump charged with perfluoro polyether. The observed build-up rate in a 9 in. pump is about 0.7 mbar-l h −1, and the decomposition products can be partially re-absorbed by the pump fluid, where they are hel...

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Bibliographic Details
Published inVacuum Vol. 44; no. 1; pp. 47 - 50
Main Authors Hirsch, EH, McKay, TJ
Format Journal Article
LanguageEnglish
Published Oxford Elsevier Ltd 1993
Elsevier
Subjects
Absorption
Applied sciences
Chemical reactions and properties
Decomposition
Degradation
Diffusion
Exact sciences and technology
Fluorine containing polymers
Mathematical models
Organic polymers
Physicochemistry of polymers
Polyethers
Reaction kinetics
Degradation
Absorption
Fluorine containing polymer
Rate equation
Emission
Ether polymer
Diffusion pump
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Summary:Experiments are presented on the build-up of gaseous products in the forevacuum of a diffusion pump charged with perfluoro polyether. The observed build-up rate in a 9 in. pump is about 0.7 mbar-l h −1, and the decomposition products can be partially re-absorbed by the pump fluid, where they are held in a weakly bound state. A rate equation for the process is developed and shown to be in agreement with the observations.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207X(93)90011-X