Thermal stability of Al/barrier/TiSix multilayer structures
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Published in | Thin solid films Vol. 320; no. 1; pp. 20 - 25 |
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Main Authors | , , , , , , , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
Lausanne
Elsevier Science
04.05.1998
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Subjects | |
Online Access | Get full text |
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