Thermodynamic modelling of MOCVD of ZrO2 from β-diketonates and different oxygen sources
Saved in:
Published in | Surface & coatings technology Vol. 88; no. 1-3; pp. 255 - 263 |
---|---|
Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Lausanne
Elsevier
1997
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
ISSN: | 0257-8972 1879-3347 |
---|---|
DOI: | 10.1016/S0257-8972(96)02930-1 |