Orientation degree characterization of diamond etched with Ce-7%Fe alloy

• Published in: Journal of rare earths Vol. 30; no. 2; pp. 170 - 174
• Main Author: 王树彬 陈强 李俊杰
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.02.2012; Key Laboratory of Aerospace Materials and Performance(Ministry ofEducation), School of Materials Science and Engineering, Beihang University, Beihing 100191, China%School of Materials Science and Engineering, Beihang University, Beifing 100191, China; School of Materials Science and Engineering, Beihang University, Beifing 100191, China
• Subjects: Cerium base alloys; Chemical vapor deposition; diamond; Diamond films; Diffraction; EBSD; Etching; Orientation; Photomicrographs; Rare earth metals; rare earths; Scanning electron microscopy; SEM; X射线衍射方法; 取向度; 合金; 扫描电子显微镜; 电子背散射衍射; 石刻; 表征; 金刚石薄膜; diamond; SEM; etching; EBSD; rare earths
• ISSN: 1002-0721; 2509-4963
• DOI: 10.1016/S1002-0721(12)60017-9

An increasing {110} orientation degree behavior was observed during etching of chemical vapor deposition （CVD） diamond films by partially melting Ce-7%Fe alloys. In order to accurately investigate this phenomenon, the X-ray diffraction method was used to identify the changes in the surface crystal orientation of the diamond films etched by Ce-7%Fe alloys, and evolution of orientation along the growth direction of the un-etched diamond film was analyzed by electron backscattering diffraction （EBSD）, and then the morphology of etched diamond surface was observed by scanning electron microscopy （SEM）. The results showed that the {110 } orientation degree of diamond surface increased due to the anisotropy in diamond etching with Ce-7%Fe, which was verified by the etching ＂pit＂ in SEM micrographs.