Ion energy effects on the intrinsic stress in BxNy layers deposited by ion-beam-assisted evaporation

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Published inSurface & coatings technology Vol. 43-44; no. 1-3; pp. 137 - 144
Main Authors STAMBOULI, V, BURAT, O, BOUCHIER, D, GAUTHERIN, G
Format Conference Proceeding Journal Article
LanguageEnglish
Published Lausanne Elsevier 05.12.1990
Subjects
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Nonmetallic coatings
Production techniques
Surface treatment
Non metal coating
Surface treatment
Non metal coatings
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Author BOUCHIER, D
GAUTHERIN, G
STAMBOULI, V
BURAT, O
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Cites_doi 10.1149/1.2129678
10.1016/0040-6090(85)90333-5
10.1063/1.339560
10.1063/1.334341
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10.1016/S0550-306X(65)80006-4
10.1116/1.576314
10.1116/1.584035
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Non metal coatings
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SubjectTerms Applied sciences
Exact sciences and technology
Metals. Metallurgy
Nonmetallic coatings
Production techniques
Surface treatment
Title Ion energy effects on the intrinsic stress in BxNy layers deposited by ion-beam-assisted evaporation
Volume 43-44
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