Ion energy effects on the intrinsic stress in BxNy layers deposited by ion-beam-assisted evaporation
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Published in | Surface & coatings technology Vol. 43-44; no. 1-3; pp. 137 - 144 |
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Main Authors | , , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
Lausanne
Elsevier
05.12.1990
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Subjects | |
Online Access | Get full text |
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ISSN: | 0257-8972 1879-3347 |
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DOI: | 10.1016/0257-8972(90)90068-N |