New thin-film sensor detects nitrogen dioxide

An inexpensive nitrogen dioxide gas sensor has been developed that will be suitable for environmental monitoring applications. The sensor combines semiconductor technology with thin film production. Developed at the University of Wales, UK, the device is prepared by a two-step sputtering-oxidation t...

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Bibliographic Details
Published inChemical & Engineering News Archive Vol. 72; no. 40; pp. 40 - 41
Main Author Freemantle, Michael
Format Magazine Article
LanguageEnglish
Published Washington American Chemical Society 03.10.1994
Subjects
Air pollution
AIR POLLUTION MONITORING
AIR POLLUTION MONITORS
CHALCOGENIDES
Chemistry
DESIGN
Emissions
Environment
ENVIRONMENTAL SCIENCES
Gases
Industrial equipment
MEASURING INSTRUMENTS
MONITORING
MONITORS
NITROGEN COMPOUNDS
NITROGEN DIOXIDE
NITROGEN OXIDES
OXIDES
OXYGEN COMPOUNDS 540120 > Environment, Atmospheric > Chemicals Monitoring & Transport > (1990-)
R&D
Research & development
Semiconductors
Sensors
TECHNOLOGY ASSESSMENT
United Kingdom > UK
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Summary:An inexpensive nitrogen dioxide gas sensor has been developed that will be suitable for environmental monitoring applications. The sensor combines semiconductor technology with thin film production. Developed at the University of Wales, UK, the device is prepared by a two-step sputtering-oxidation technique. A film of metallic tin is deposited on a platinum contact array on an alumina substrate by radio frequency sputtering from a tin target heated in an atmosphere of argon. The tin is oxidized by heating in an oxygen stream. Operational mechanisms of the device are explained. The sensor is very sensitive to NO sub(2) but shows virtually no response to carbon monoxide, hydrogen, or methane at 200 degree C. At higher temperatures, responses to some other gases occur. Some development work remains, but the device eventually will be commercially available.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
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ISSN:0009-2347
2157-4936
1520-605X
DOI:10.1021/cen-v072n040.p040