Generating MgO bicrystal templates using a two-step ion-beam assisted texturing process

• Published in: Thin solid films Vol. 517; no. 2; pp. 609 - 612
• Main Authors: Vallejo, Ronald N., Lu, Rongtao, Wu, Judy Z.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 28.11.2008; Elsevier
• Subjects: Bicrystal array; Bicrystal template; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Ion and electron beam-assisted deposition; ion plating; Ion-beam assisted deposition; Magnesium oxide (MgO); Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Reflection high energy electron diffraction; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; X-ray diffraction; X-ray diffraction; Magnesium oxide (MgO); Bicrystal template; Bicrystal array; Reflection high energy electron diffraction; Ion-beam assisted deposition; Crystal defects; Bicrystals; Magnesium oxide; Template reaction; XRD; Ion beam assisted deposition method; RHEED; Ion beams; Thin film devices; Microstructure; Arrays
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2008.07.010

A two-step ion-beam assisted texturing process has been developed to generate 10 nm thick MgO bicrystal templates on technical important substrates. The in-plane tilt grain boundary angle can be selected from nearly the whole range of few to 45° by simply rotating the sample azimuthally with respect to the incident ion beam. Using this process, 10 nm thick, 45-degree in-plane-tilt MgO bicrystal templates and microarrays have been obtained on Si substrates. By choosing appropriate masks, this process may be applied for generating bicrystal arrays of sophisticated geometry and multiple-scale dimension, which are desired for various thin-film electronic device applications.