Purification of Au EBID structures by electron beam post-irradiation under oxygen flux at room temperature

Electron Beam Induced Deposition (EBID) is a single-step fabrication method for the nanostructures of a variety of materials. However, Au EBID structures deposited with Me sub(2)Au(acac) precursor are carbon-rich with only 10-15 at.% Au. Although annealing in air or under oxygen at high temperature...

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Bibliographic Details
Published inMicroelectronic engineering Vol. 141; pp. 207 - 210
Main Authors Mehendale, S., Mulders, J.J.L., Trompenaars, P.H.F.
Format Journal Article
LanguageEnglish
Published 15.06.2015
Subjects
Contact
Deposition
Distortion
Electrical resistivity
Electron beams
Flux
Nanostructure
Precursors
Purification
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Summary:Electron Beam Induced Deposition (EBID) is a single-step fabrication method for the nanostructures of a variety of materials. However, Au EBID structures deposited with Me sub(2)Au(acac) precursor are carbon-rich with only 10-15 at.% Au. Although annealing in air or under oxygen at high temperature improves the purity, it usually results in unwanted shape distortion of the structures. We have observed that the in situ post-deposition electron beam irradiation of Au EBID structures under oxygen flux while the substrate is kept at room temperature leads to highly pure Au structures with minimal shape distortion. The purification process is optimized after studying the effects of different parameters like primary electron beam energy, electron dose and oxygen flux. The resistivity of the Au contact fabricated by sequential deposition and purification process is found out to be 17 + or - 2 [mu][Omega] cm.
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ISSN:0167-9317
DOI:10.1016/j.mee.2015.03.034