Electrical resistivity of RuOx thin films prepared by ion beam sputter deposition

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Bibliographic Details
Published inApplied surface science Vol. 65-66; pp. 293 - 297
Main Authors KEZUKA, H, EGERTON, R, MASUI, M, WADA, T, IKEHATA, T, MASE, H, TAKEUCHI, M
Format Conference Proceeding Journal Article
LanguageEnglish
Published Amsterdam Elsevier Science 01.03.1993
Subjects
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Electronic transport phenomena in thin films and low-dimensional structures
Exact sciences and technology
Physics
Electron energy loss spectrum
Electrical conductivity
Ion beam sputtering
Thin film
Ruthenium Oxides
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ISSN:0169-4332
1873-5584
DOI:10.1016/0169-4332(93)90674-Z