WNx films prepared by reactive ion-beam sputter deposition
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Published in | Applied surface science Vol. 53; pp. 353 - 357 |
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Main Authors | , , , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
Amsterdam
Elsevier Science
01.11.1991
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Subjects | |
Online Access | Get full text |
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ISSN: | 0169-4332 1873-5584 |
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DOI: | 10.1016/0169-4332(91)90285-R |