A novel technique for the fabrication of herringbone grooves in a dynamic thrust bearing combining UV-LIGA with electro-discharge machining

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Bibliographic Details
Published inMicrosystem technologies : sensors, actuators, systems integration Vol. 12; no. 6; pp. 529 - 536
Main Authors KUO, J. S, CHIU, K. T, HSU, S. W, CHEN, P. H, LIAO, Y. S
Format Journal Article
LanguageEnglish
Published Berlin Springer 01.05.2006
Subjects
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Human
Molding
Electroforming
Electrical discharge machining
LIGA
UV lithography
Thrust bearing
Microelectrode
Groove
Electrodeposition
Rafter
Mold
Photoresist
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ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-005-0053-3