Bi2Te3-Based Flexible Micro Thermoelectric Generator With Optimized Design

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Bibliographic Details
Published inJournal of microelectromechanical systems Vol. 18; no. 3; pp. 763 - 772
Main Authors GLATZ, Wulf, SCHWYTER, Etienne, DURRER, Lukas, HIEROLD, Christofer
Format Journal Article
LanguageEnglish
Published New York, NY Institute of Electrical and Electronics Engineers 2009
Subjects
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
Transducers
thermoelectric generator
Precision engineering
Thermocouples
power MEMS
Epoxy resin
Optimization
Thermoelectric properties
Thermoelectric effect
Bismuth tellurides
Te
p type semiconductor
Electric generators
Electrodeposition
Modelling
Microelectromechanical device
Mold
Production process
3-D microstructure
Bi
electrochemical deposition (ECD)
SU-8
Experimental study
Engineering design
Temperature measurement
Material engineering
Photoresists
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ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2009.2021104