Electrical characteristics of Ta2O5 based capacitors with different gate electrodes
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Published in | Applied physics. A, Materials science & processing Vol. 82; no. 1; pp. 55 - 62 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Berlin
Springer
2006
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Subjects | |
Online Access | Get full text |
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ISSN: | 0947-8396 1432-0630 |
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DOI: | 10.1007/s00339-005-3300-7 |