Effect of phosphorus content on structural properties of phosphorus incorporated tetrahedral amorphous carbon films
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Published in | Applied physics. A, Materials science & processing Vol. 88; no. 2; pp. 341 - 345 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Berlin
Springer
01.08.2007
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Subjects | |
Online Access | Get full text |
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ISSN: | 0947-8396 1432-0630 |
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DOI: | 10.1007/s00339-007-3938-4 |