Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films

• Published in: Thin solid films Vol. 516; no. 15; pp. 4733 - 4741
• Main Authors: LUBGUBAN, A. A, LUBGUBAN, J. A, OTHMAN, M. T, SHENDE, R. V, GANGOPADHYAY, S, MILLER, R. D, VOLKSEN, W, KIM, H.-C
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier Science 02.06.2008
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Dielectric thin films; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Exact sciences and technology; Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids); Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Nanoscale materials and structures: fabrication and characterization; Organic-inorganic hybrid nanostructures; Physics; Nanohybrid; Fourier transform spectroscopy; Dielectric constant; Ketones; Spectroscopic ellipsometry; Dielectric materials; Thermal decomposition; Porous materials; Template reaction; Surfactants; Surfactant; Polyethylene glycols; Supercritical CO2; Mesoporosity; Thin film; Ethylene oxide polymer; Optical properties; Dielectric thin films; Bromides; Supercritical solvent; Ethers; Permittivity; Co-solvent; Optical constants
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2007.08.099