Optical characterization of HfO2 by spectroscopic ellipsometry : Dispersion models and direct data inversion
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Published in | Thin solid films Vol. 516; no. 22; pp. 7990 - 7995 |
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Main Authors | , , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
Lausanne
Elsevier Science
30.09.2008
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Subjects | |
Online Access | Get full text |
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ISSN: | 0040-6090 1879-2731 |
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DOI: | 10.1016/j.tsf.2008.04.007 |