Nanostructures on microstructured surfaces
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Published in | Microsystem technologies Vol. 13; no. 5-6; pp. 483 - 486 |
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Main Authors | , , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
Berlin
Springer
01.03.2007
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Subjects | |
Online Access | Get full text |
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ISSN: | 0946-7076 1432-1858 |
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DOI: | 10.1007/s00542-006-0191-2 |