3 Laser transmission joining in microtechnology

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Bibliographic Details
Published inMicrosystem technologies Vol. 12; no. 7; pp. 632 - 639
Main Authors HABERSTROH, Edmund, HOFFMANN, Wolf-Martin, POPRAWE, Reinhart, SARI, Fahri
Format Conference Proceeding Journal Article
LanguageEnglish
Published Berlin Springer 01.06.2006
Subjects
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Thermoplastics
Carbon black
Welding
Process control
Micro systems
Measurement sensor
Glass
Hybrid
Thermomechanical properties
Sog
Experimental study
Laser welding
Penetration depth
Weld
Direct method
Pyrometer
Control loop
Heating
Morphology
Laser
Silicon
Temperature control
Thermoplasticity
Bonding
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ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-006-0096-0