Surface micromachined high-performance RF MEMS inductors

• Published in: Microsystem technologies : sensors, actuators, systems integration Vol. 13; no. 1; pp. 79 - 83
• Main Authors: FANG, Dong-Ming, YONG ZHOU, WANG, Xi-Ning, ZHAO, Xiao-Lin
• Format: Journal Article
• Language: English
• Published: Berlin Springer 01.01.2007
• Subjects: Applied sciences; Circuit properties; Electric, optical and optoelectronic circuits; Electronics; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; High performance; Polyimide; Q factor; Metal; Experimental study; Inductor; System with n degrees of freedom; Inductance; Microwave circuit; Electrodeposition; Surface micromachining; Copper; Microelectromechanical device
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-006-0262-4