Off-line metrology on SEM images using gray scale morphology
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Published in | Mikrochimica acta (1966) Vol. 155; no. 1-2; pp. 323 - 326 |
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Main Authors | , , |
Format | Conference Proceeding Journal Article |
Language | English |
Published |
Wien
Springer
01.09.2006
New York, NY |
Subjects | |
Online Access | Get full text |
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ISSN: | 0026-3672 1436-5073 |
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DOI: | 10.1007/s00604-006-0564-3 |