Thermal Recording for High-Density Optical Disc Mastering

Thermal recording using a dielectric as a recording material was examined to make a high-density optical disc master. We confirmed that a pit of 53 nm length was able to be recorded with a laser of 405 nm wavelength. As a result we could make a master with a 200 gigabyte (GB) data capacity with a co...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 49; no. 8; pp. 08KG03 - 08KG03-4
Main Authors Yamaoka, Nobuki, Murakami, Shigenori, Sugawara, Yukihiro, Ohshima, Seiro, Takishita, Toshihiko, Yokogawa, Fumihiko
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.08.2010
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Summary:Thermal recording using a dielectric as a recording material was examined to make a high-density optical disc master. We confirmed that a pit of 53 nm length was able to be recorded with a laser of 405 nm wavelength. As a result we could make a master with a 200 gigabyte (GB) data capacity with a conventional laser beam recorder (LBR). A 100 GB disc made by the same method was able to be read with a tester equipped with a solid immersion lens (SIL) and the measured jitter value was 9.9%.
Bibliography:(Color online) Thermal recording. (Color online) Silicon master structure. (a) Without amorphous Si layer. (b) With amorphous Si layer. (Color online) Effect of annealing on the solubility of the dielectric layer. Electron beam diffraction patterns. (Color online) Process flow of thermal recording. (a) Si master structure. (b) Laser recording. (c) Developing. (d) Reactive ion etching, and (e) Dielectric removal. Exposure configuration. (Color online) Thermal recording machine. (Color online) Disc and lens structure. Actual pit length plotted against recorded signal frequency. 200 GB disc pit pattern. (a) SEM image. (b) Histogram of pit lengths. (Color online) 100 GB disc. (a) SEM image of the injection-molded substrate. (b) Limit equalizer output waveform. SEM image of 250 GB master.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.49.08KG03