Thickness Control of Graphene Overlayer via Layer-by-Layer Growth on Graphene Templates by Chemical Vapor Deposition

We examined graphene growth on graphene templates prepared by the mechanical exfoliation of graphite crystals using a sloped-temperature chemical vapor deposition (CVD) apparatus with ethanol. The structural characterization of the grown graphene layers in detail by atomic force microscopy and Raman...

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Published inJapanese Journal of Applied Physics Vol. 50; no. 6; pp. 06GE04 - 06GE04-4
Main Authors Negishi, Ryota, Hirano, Hiroki, Ohno, Yasuhide, Haehashi, Kenzo, Matsumoto, Kazuhiko, Kobayashi, Yoshihiro
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.06.2011
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Summary:We examined graphene growth on graphene templates prepared by the mechanical exfoliation of graphite crystals using a sloped-temperature chemical vapor deposition (CVD) apparatus with ethanol. The structural characterization of the grown graphene layers in detail by atomic force microscopy and Raman spectroscopy reveals that the film thickening of graphene overlayers proceeds by the layer-by-layer growth mode, and that film thickness increases linearly as a function of growth time. This result indicates that a graphene growth technique using the CVD apparatus is a potential approach to precisely controlling the number of graphene layers, which is one of the important subjects for fabricating practical devices with uniform electrical properties using graphene as the channel material, such as field effect transistors.
Bibliography:Schematic drawing of the sloped-temperature CVD apparatus with ethanol. Typical optical microscope images of mechanically exfoliated graphene flakes before and after growth using the sloped-temperature CVD apparatus. The inset scale bars are 5 μm. Growth thickness of graphene layers as a function of CVD growth time. (a) AFM images obtained from the pristine and grown graphene surfaces, and (b) RMS roughness measured by AFM as a function of growth time. The inset scale bars are 200 nm. Raman spectra of: (a) graphene with eight layers grown by CVD from pristine graphene with three layers and (b) pristine graphene with eight layers. The dash and red solid lines show the Lorentzian peaks and fitting results, respectively. Schematic drawings for layer-by-layer growth mechanism of graphenes by CVD with ethanol.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.50.06GE04