Realization of a Cost-Effective Deformable Grating for the Extreme-Ultraviolet

Abstract The application of a deformable grating to the realization of a time delay compensated monochromator is presented. The grating is realized as a replica on a thin glass substrate and the deformation is realized with a mechanical bender. The monochromator is conceived for the spectral selecti...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 2380; no. 1; pp. 12058 - 12061
Main Authors Samparisi, F, Frassetto, F, Zeni, G, Vanzo, A, Bonora, S, Zuppella, P, Poletto, L
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.12.2022
Subjects
Deformation effects
Formability
Glass substrates
Harmonic generations
Optical design
Physics
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Summary:Abstract The application of a deformable grating to the realization of a time delay compensated monochromator is presented. The grating is realized as a replica on a thin glass substrate and the deformation is realized with a mechanical bender. The monochromator is conceived for the spectral selection of a single harmonic in the spectral range 20-80 nm in beamlines exploiting the high harmonic generation process. A possible optical design requiring only two deformable gratings, a mirror and an intermediate slit is presented.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2380/1/012058