Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization

Abstract An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 2270; no. 1; pp. 12014 - 12017
Main Authors Terentev, T N, Zheltukhin, V S, Shemakhin, A Yu, Nekrasov, I K, Samsonova, E S, Shemakhin, E Yu, Tsokalo, I E, Tyurin, V A
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.05.2022
Subjects
Cyclotron frequency
Functional materials
Ion cyclotron radiation
Low pressure
Physics
Radio frequency plasma
Synchronism
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Summary:Abstract An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2270/1/012014