Design of High-Precision Micro-Capacitance Detection System

Abstract The focus of this paper is on the development of micro-displacement measurement system of Beam Steering Mechanism (BSM) and Fast Sweeping Mirror (FSM) using in space remote sensor. The main objective is to design a micro-capacitance measuring technology based on Pcap01. In the proposed appr...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 2437; no. 1; pp. 12081 - 12087
Main Authors Kang, Jianbing, Li, Jing, Liu, Xuefeng, Lian, Huadong, Zhang, Ai
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.01.2023
Subjects
Beam steering
Capacitance
Capacitance detection
Displacement measurement
micro displacement measurement
PCAP01
Physics
Remote sensors
resolution
Steering mechanisms
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Summary:Abstract The focus of this paper is on the development of micro-displacement measurement system of Beam Steering Mechanism (BSM) and Fast Sweeping Mirror (FSM) using in space remote sensor. The main objective is to design a micro-capacitance measuring technology based on Pcap01. In the proposed approach, first, the principle of capacitance measurement and the design of hardware and software of the system are introduced; then, the system is implemented to high-precision results below 3.5nF. The experiment results show that under the 1KHz output data rate, the system can achieve a resolution of 1.4fF in the range of 1pF~30pF, which can meet the system requirements of range and accuracy ratio of 20000.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2437/1/012081