Development of diffractive optical elements with low surface roughness by direct laser writing

A novel method of forming the phase diffractive optical elements (DOEs) by direct laser writing in thin films of aluminum was presented. The quality of the writing process in aluminum films were investigated depending on the parameters of magnetron sputtering process. This method of phase diffractio...

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 1124; no. 5; pp. 51041 - 51044
Main Authors Fomchenkov, S A, Porfirev, A P
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.12.2018
Subjects
Aluminum
Diffractive optical elements
Direct laser writing
Magnetron sputtering
Microscopes
Optical components
Process parameters
Surface roughness
Thin films
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Summary:A novel method of forming the phase diffractive optical elements (DOEs) by direct laser writing in thin films of aluminum was presented. The quality of the writing process in aluminum films were investigated depending on the parameters of magnetron sputtering process. This method of phase diffraction optical elements forming substantially reduces the time, fabrication steps, costs of production and significantly improves the quality of the elements in comparison with traditional methods.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1124/5/051041