Fabrication of diamond nanopowder using microwave plasma torch technique

This article presents a manufacturing process for diamond nanopowder by using a microwave plasma torch technique in a laboratory at near atmospheric pressure. The unique technique utilized in the arrangement is the hybrid plasma torch which was patented in 1997 by Dr. Cheng-Ming Wu in Taiwan. It has...

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Bibliographic Details
Published inInternational journal of advanced manufacturing technology Vol. 34; no. 3-4; pp. 316 - 322
Main Authors Ting, Chen-Ching, Young, Tai-Fa, Jwo, Ching-Song
Format Journal Article
LanguageEnglish
Published Heidelberg Springer Nature B.V 01.09.2007
Subjects
Atmospheric pressure
Catalysis
Catalysts
Diamonds
Flow velocity
Gas mixtures
Methane
Microwave plasmas
Nanoparticles
Plasma
Synthesis
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Summary:This article presents a manufacturing process for diamond nanopowder by using a microwave plasma torch technique in a laboratory at near atmospheric pressure. The unique technique utilized in the arrangement is the hybrid plasma torch which was patented in 1997 by Dr. Cheng-Ming Wu in Taiwan. It has the advantage of working at near atmospheric pressure and does not require an extreme vacuum system, which is a necessary condition for fabrication of a large amount of nanoparticles. The applied constituents of gas mixtures for synthesizing diamond nanopowder in the process are CH4 with AR and CH4 with N2, where AR and N2 serve as catalysts. In processing the reaction chamber, it is first pumped to varied pressures from 40–300 Torr to induce plasma; then, the input reactive gas CH4 is fixed at a constant flow rate of 0.6 l/min and mixed up with varied input flow rate of the catalysts Ar and N2 from 0.6–1.2 l/min. The particle size of synthesized diamond nanopowder is within about 25--50 nm diameter, which mainly depends on flow rate of CH4:AR and CH4:N2.
ISSN:0268-3768
1433-3015
DOI:10.1007/s00170-006-0603-6