Properties of a low-pressure inductive RF discharge II: Mathematical simulations

Self-consistent numerical simulations of a low-pressure inductive RF discharge have been carried out. It is shown that, on the one hand, the plasma parameters are determined by the RF power absorbed in the plasma and, on the other, they themselves govern the power absorption. This results in a nonmo...

Full description

Saved in:
Bibliographic Details
Published inPlasma physics reports Vol. 33; no. 9; pp. 746 - 756
Main Authors Aleksandrov, A. F., Vavilin, K. V., Kral’kina, E. A., Pavlov, V. B., Rukhadze, A. A.
Format Journal Article
LanguageEnglish
Published United States 01.09.2007
Subjects
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ABSORPTION
COMPUTERIZED SIMULATION
MAGNETIC FIELDS
PLASMA
PLASMA SIMULATION
RADIOWAVE RADIATION
Online AccessGet full text

Cover

More Information
Summary:Self-consistent numerical simulations of a low-pressure inductive RF discharge have been carried out. It is shown that, on the one hand, the plasma parameters are determined by the RF power absorbed in the plasma and, on the other, they themselves govern the power absorption. This results in a nonmonotonic dependence of the plasma parameters on the magnetic field, as well as in discharge disruptions, similar to those observed experimentally in such discharges. An inductive RF discharge with a capacitive component is simulated. The experimentally observed characteristic properties of the discharges are explained based on the regular features of the absorption of RF power in the plasma. Traditional inductive plasma sources (both without and with a magnetic field) are considered.
ISSN:1063-780X
1562-6938
DOI:10.1134/S1063780X0709005X