Impedance Spectroscopy Based on Microwave Probe Measurements

We have studied the influence of non-ideal standard loads of the probe station on the accuracy of microwave impedance spectrum measurements in the process of testing electronic devices and materials. Using the Cascade Microtech station as an example, it is shown that the calibration procedure based...

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Bibliographic Details
Published inRadiophysics and quantum electronics Vol. 67; no. 7; pp. 546 - 557
Main Author Reznik, A. N.
Format Journal Article
LanguageEnglish
Published New York Springer US 01.12.2024
Springer Nature B.V
Subjects
Astronomy
Astrophysics and Astroparticles
Errors
Hadrons
Heavy Ions
Impedance measurement
Lasers
Mathematical and Computational Physics
Microwave probes
Nuclear Physics
Observations and Techniques
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
Quantum Optics
Theoretical
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Summary:We have studied the influence of non-ideal standard loads of the probe station on the accuracy of microwave impedance spectrum measurements in the process of testing electronic devices and materials. Using the Cascade Microtech station as an example, it is shown that the calibration procedure based on standard loads leads to significant measurement errors. Prospects for improving load characteristics in order to eliminate errors are given. An original technique of impedance measurement, which is free of these problems, is considered.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
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content type line 14
ISSN:0033-8443
1573-9120
DOI:10.1007/s11141-025-10396-1