Measurements of Local Lattice Strains Near Insulating Film Edges in Silicon Crystals

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 13; no. S1; p. 829
Main Authors Yukimoto, Yoshinori, Hirao, Tadashi
Format Journal Article
LanguageEnglish
Published 01.01.1974
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAPS.2S1.829