Surface Internal Friction in High-Q Fused Quartz Resonators

— This paper examines mechanisms responsible for internal friction in the surface layer of fused quartz, which degrades the performance of high- Q mechanical resonators. We propose a combined process for surface treatment of such resonators, which includes asymptotic mechanical treatment, chemical r...

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Bibliographic Details
Published inInorganic materials Vol. 58; no. 6; pp. 636 - 642
Main Authors Lunin, B. S., Lopatin, V. M.
Format Journal Article
LanguageEnglish
Published Moscow Pleiades Publishing 01.06.2022
Springer Nature B.V
Subjects
Adequacy
Chemistry
Chemistry and Materials Science
Fused quartz
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Internal friction
Materials Science
Performance degradation
Resonators
Surface layers
Surface treatment
internal friction
fused quartz
distorted layer
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Summary:— This paper examines mechanisms responsible for internal friction in the surface layer of fused quartz, which degrades the performance of high- Q mechanical resonators. We propose a combined process for surface treatment of such resonators, which includes asymptotic mechanical treatment, chemical removal of a surface glass zone, and secondary annealing for stress relieve in the material. Data are presented that demonstrate adequacy of this approach. The proposed process allows one to fabricate fused quartz mechanical resonators with a quality factor of 10 7 and above.
ISSN:0020-1685
1608-3172
DOI:10.1134/S0020168522050077