Optical and Irradiation-Resistant Properties of ITO Films on F46 and PI Substrates

• Published in: Transactions of Tianjin University Vol. 25; no. 2; pp. 195 - 200
• Main Authors: Zhou, Chao, Zhou, Hui, He, Yanchun, Yang, Miao, Xiong, Yuqing, Xu, Lingmao, Wang, Yi
• Format: Journal Article
• Language: English
• Published: Tianjin Tianjin University 01.04.2019; Springer Nature B.V; Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000,China
• Subjects: Crystal defects; Electrical properties; Engineering; Humanities and Social Sciences; Indium tin oxides; Irradiation; Magnetic properties; Magnetron sputtering; Mechanical Engineering; Morphology; multidisciplinary; Near infrared radiation; Optical properties; Reflectance; Research Article; Science; Substrates; Surface roughness; Ultraviolet radiation; Transparent flexible substrates; Vacuum ultraviolet irradiation-resistant property; Indium tin oxide; Optical properties
• ISSN: 1006-4982; 1995-8196
• DOI: 10.1007/s12209-018-0153-7

This study investigated indium tin oxide (ITO) films that were deposited on fluororesin-46 (F46) and polyimide (PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible, near-infrared, and infrared spectral regions were obtained, and the surface morphology, and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated. The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation, and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation.