耿新华, 王. 张. 赵. 魏. 许. 孙. (2009). Effects of modulation frequency on the structure and electrical characteristics of μc-Si：H films prepared by pulsed VHF-PECVD. Optoelectronics letters, 5(3), 212-215. https://doi.org/10.1007/s11801-009-8206-8
Chicago Style (17th ed.) Citation耿新华, 王世锋 张晓丹 赵颖 魏长春 许盛之 孙建. "Effects of Modulation Frequency on the Structure and Electrical Characteristics of μc-Si：H Films Prepared by Pulsed VHF-PECVD." Optoelectronics Letters 5, no. 3 (2009): 212-215. https://doi.org/10.1007/s11801-009-8206-8.
MLA (9th ed.) Citation耿新华, 王世锋 张晓丹 赵颖 魏长春 许盛之 孙建. "Effects of Modulation Frequency on the Structure and Electrical Characteristics of μc-Si：H Films Prepared by Pulsed VHF-PECVD." Optoelectronics Letters, vol. 5, no. 3, 2009, pp. 212-215, https://doi.org/10.1007/s11801-009-8206-8.