Implementation of Autofocus in Alignment System for Layered Imprint Fabrication

• Published in: Transactions of Tianjin University Vol. 15; no. 4; pp. 294 - 299
• Main Author: 王权岱 段玉岗 卢秉恒 向家伟 杨连发
• Format: Journal Article
• Language: English
• Published: Heidelberg Tianjin University 01.08.2009; State Key Lab for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China%School of Mechanical and Electrical Engineering, Guilin University of Electronic Technology,Guilin 541004, China
• Subjects: Engineering; Humanities and Social Sciences; Mechanical Engineering; multidisciplinary; Science; 信息分析; 制造过程; 图像内容; 对准系统; 自动对焦功能; 计算效率; autofocus algorithm; imprint lithography; alignment; layered fabrication
• ISSN: 1006-4982; 1995-8196
• DOI: 10.1007/s12209-009-0052-z

Autofocus method based on the analysis of image content information is investigated to reduce the alignment error resulting from mark positioning uncertainty due to defocus in microstructure layered fabrication process based on multilevel imprint lithography. The applicability of several autofocus functions to the alignment mark images is evaluated concerning their uniformity, sharpness near peak, reliability and measure computation efficiency and the most suitable one based on power spectrum in frequency domain （PSFD） is adopted. To solve the problem of too much computation amount needed in PSFD algorithm, the strategy of interested region detection and effective image reconstruction is proposed and the algorithm efficiency is improved. The test results show that the computation time is reduced from 0.316 s to 0.023 s under the same conditions while the other merits of the function are preserved, which indicates that the modified algorithm can meet the mark image autofocusing requirements in response time, accuracy and robustness. The alignment error due to defocus which is about 0.5 μm indicated by experimental results can be reduced or eliminated by the autofocusing implementation.