Transient striations in an inductively coupled plasma during E-to-H transitions

Abstract Azimuthal transient striations are reported for inductively coupled Ar plasma during E-to-H transition at 200 mTorr. In this transient process, the number of striations increases with time, and striations ultimately disappear when the H mode is reached. An integrated model is developed to i...

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Bibliographic Details
Published inPlasma sources science & technology Vol. 33; no. 2; pp. 25026 - 25036
Main Authors Gu, Meng-Zhi, Lei, Zhi-Cheng, Zhang, Xuan, Pu, Yi-Kang
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.02.2024
Subjects
inductively coupled plasma
ionization instability
mode transition
transverse striation
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Summary:Abstract Azimuthal transient striations are reported for inductively coupled Ar plasma during E-to-H transition at 200 mTorr. In this transient process, the number of striations increases with time, and striations ultimately disappear when the H mode is reached. An integrated model is developed to investigate the mechanism of this phenomenon. This integrated model incorporates a one-dimensional time-dependent fluid model with a perturbation analysis, as well as a circuit model for power coupling with the external radio-frequency driving source. Based on this integrated model, the development of striations is proposed to be a consequence of ionization instability due to the variation in the electron energy distribution function. The model results for the temporal evolution of the number of striations are in good agreement with the observed data.
Bibliography:PSST-106294
ISSN:0963-0252
1361-6595
DOI:10.1088/1361-6595/ad2951