Effect of magnetic field on the growth of α-Fe2O3 thin films by atomic layer deposition

• Published in: Applied surface science Vol. 227; no. 1-4; pp. 40 - 47
• Main Authors: Nilsen, O., Lie, M., Foss, S., Fjellvåg, H., Kjekshus, A.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 15.04.2004; Elsevier Science
• Subjects: Atomic layer deposition (ALD); Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Effect of magnetic field; Exact sciences and technology; Hematite α-Fe2O3; Physics; Effect of magnetic field; Hematite α-Fe2O3; Atomic layer deposition (ALD); Atomic force microscopy; Inorganic compounds; Growth rate; Epitaxy; Transition element compounds; Magnetic field effects; XRD; Surface topography; Preferred orientation; Texture; Soda-lime glasses; Film growth; Thin films; Transmission electron microscopy; Transition elements; Ferromagnetism; Iron oxides; Aluminium oxides
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2003.10.045

Effect of magnetic field on the growth of α-Fe2O3 thin films on soda–lime–glass and α-Al2O3(001) substrates with the atomic layer deposition (ALD) technique is reported. Alterations in texture of the deposited films have been investigated by XRD and TEM, and topography by AFM. It is possible to alter the preferred growth orientation of films on soda–lime–glass substrates from preferred [001] to random polycrystalline orientation by application of a magnetic field. The epitaxial growth on α-Al2O3(001) is, however, not affected by application of a magnetic field. The growth rate of films deposited on soda–lime–glass substrates is reduced by a factor of 3/2 by application of a magnetic field, whereas the growth rate on α-Al2O3(001) is not affected. The complete mechanism behind the occurrence or absence of modified growth in external magnetic fields is not uncovered, but factors such as: presence/absence of iron sites, activation of surface iron to accept thd liberated during the chemisorbtion of Fe(thd)2, and presence of parasitic ferromagnetism may be of importance in the present case.