A high sensitivity process variation sensor utilizing sub-threshold operation

In this paper, we propose a novel low-power, bias-free, high-sensitivity process variation sensor for monitoring random variations in the threshold voltage. The proposed sensor design utilizes the exponential current-voltage relationship of sub-threshold operation thereby improving the sensitivity b...

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Bibliographic Details
Published in2008 IEEE Custom Integrated Circuits Conference pp. 125 - 128
Main Authors Meterelliyoz, M., Song, P., Stellari, F., Kulkarni, J.P., Roy, K.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.09.2008
Subjects
Circuit stability
Circuit testing
Fluctuations
Manufacturing processes
Monitoring
process variations
Random access memory
Random processes
random threshold voltage variations
sensor
Sensor phenomena and characterization
sub-threshold operation
Threshold voltage
Yield estimation
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Summary:In this paper, we propose a novel low-power, bias-free, high-sensitivity process variation sensor for monitoring random variations in the threshold voltage. The proposed sensor design utilizes the exponential current-voltage relationship of sub-threshold operation thereby improving the sensitivity by 2.3X compared to the above-threshold operation. A test-chip containing 128 PMOS and 128 NMOS devices has been fabricated in 65 nm bulk CMOS process technology. A total of 28 dies across the wafer have been fully characterized to determine the random threshold voltage variations.
ISBN:9781424420186
1424420180
ISSN:0886-5930
2152-3630
DOI:10.1109/CICC.2008.4672037