Effect of Ni7＋ Ion Irradiation on Structure and Ammonia Sensing Properties of Thermally Oxidized Zinc and Indium Films

ZnO and In203 films were prepared by thermal oxidation of vacuum deposited zinc and indium films, respec- tively onto the glass substrate at 30 ℃. The fabricated films have been irradiated with 100-MeV Ni7＋ ions at different fluences ranging from 5×1011 to 5×1013 ions/cm2. The structural and gas sen...

Full description

Saved in:
Bibliographic Details
Published inJournal of materials science & technology Vol. 28; no. 8; pp. 700 - 706
Main Authors Bal, Amandeep Kaur, Singh, Rajinder, Bedi, R.K.
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 01.08.2012
Subjects
Gas sensing
In2O3 film
Ion irradiation
Thermal oxidation
X-射线衍射
ZnO film
ZnO薄膜
传感特性
氧化锌
氨
离子辐照
结构
铟
ZnO film
In2O3 film
Gas sensing
Ion irradiation
Thermal oxidation
Online AccessGet full text

Cover

More Information
Summary:ZnO and In203 films were prepared by thermal oxidation of vacuum deposited zinc and indium films, respec- tively onto the glass substrate at 30 ℃. The fabricated films have been irradiated with 100-MeV Ni7＋ ions at different fluences ranging from 5×1011 to 5×1013 ions/cm2. The structural and gas sensing properties of pristine and irradiated films have been discussed. X-ray diffraction （XRD） pattern of pristine and irradiated films reveal that the films are polycrystalline in nature and crystallinity increases after irradiation. In this study, highly porous In203 nanorods evolved when being irradiated at a fluence of 5×1013 ions/cm2 while ZnO film shows decrease in number of nanowires. The ammonia sensing performance of the Ni^7＋ irradiated In203 films shows an improvement as compared to its pristine counterpart.
Bibliography:ZnO and In203 films were prepared by thermal oxidation of vacuum deposited zinc and indium films, respec- tively onto the glass substrate at 30 ℃. The fabricated films have been irradiated with 100-MeV Ni7＋ ions at different fluences ranging from 5×1011 to 5×1013 ions/cm2. The structural and gas sensing properties of pristine and irradiated films have been discussed. X-ray diffraction （XRD） pattern of pristine and irradiated films reveal that the films are polycrystalline in nature and crystallinity increases after irradiation. In this study, highly porous In203 nanorods evolved when being irradiated at a fluence of 5×1013 ions/cm2 while ZnO film shows decrease in number of nanowires. The ammonia sensing performance of the Ni^7＋ irradiated In203 films shows an improvement as compared to its pristine counterpart.
21-1315/TG
Thermal oxidation; ZnO film; In203 film; Ion irradiation; Gas sensing
ISSN:1005-0302
1941-1162
DOI:10.1016/S1005-0302(12)60118-2