Cavity Q Measurements of Silica Microspheres with Nanocluster Silicon Active Layer
In this paper, the effect of the nanocluster-silicon (nc-Si) active layer on the cavity Q of silica microspheres is investigated. The silicon-rich silicon oxide (SRSO) (140plusmn10 nm thick) films with excess Si content ranging from 5 to 14 at.% were deposited on the silica microspheres formed by th...
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Published in | IEEE journal of selected topics in quantum electronics Vol. 12; no. 6; pp. 1388 - 1393 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
IEEE
01.11.2006
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Subjects | |
Online Access | Get full text |
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Summary: | In this paper, the effect of the nanocluster-silicon (nc-Si) active layer on the cavity Q of silica microspheres is investigated. The silicon-rich silicon oxide (SRSO) (140plusmn10 nm thick) films with excess Si content ranging from 5 to 14 at.% were deposited on the silica microspheres formed by the CO 2 laser melting of an optical fiber, and subsequently annealed at temperatures ranging from 650degC to 1100 degC. The cavity Q of the spheres with the active layer was measured at 1.56 mum using a tunable external cavity coupled laser diode and a tapered fiber coupling. We find that the presence of the nc-Si active layer reduces the Q value of the microsphere from ges 2times10 7 to (2-5) times10 5 . However, we found no correlation between the formation, size, and density of the nc-Si and the cavity Q-factor, indicating that the scattering by the nc-Si does not present the dominant optical loss mechanism in the SRSO film |
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ISSN: | 1077-260X 1558-4542 |
DOI: | 10.1109/JSTQE.2006.885631 |